Research and development in fundamental technologies that will support ubiquitous devices, including high-precision fine process technologies, micro-machining technologies, and advanced function thin-film production technologies.     Silicon Photonics     - Fusion of optical and electronic devices to promote increased functionality of communications equipments -   Free-space optics     - Switching optical paths by micromirrors -   Surface Plasmon Bio-chemical Sensor     - Simple biomolecule sensor useful for medical treatment -   Silicon Nanophotonics   3D-MEMS Optical Switch   SPR Biosensor   Wearable Laser Blood Flowmeter   Portable BTX Gas Sensor