Attachment

Figure 1
Figure 1. Two-axis-of-rotation drive that can be loaded into an EB lithography apparatus.


Figure 2 Figure 3
Figure 2. Height measurement system (left) used to focus the EB on the sample surface, and the EB lithography apparatus (right).
Figure 3. Illustration showing how to determine the position



Figure 4
Figure 4. The world's smallest globe (nano-globe). It displays coastlines and rivers, and there is some contrast between land and sea areas. The patterning (EB exposure) of the entire world map only took about 2 minutes.



Figure 5
Figure 5. Nano-filter with holes as small as 30 nanometers in diameter.


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