Figure 1. Two-axis-of-rotation drive that can be loaded into an EB lithography apparatus.
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Figure 2. Height measurement system (left) used to focus the EB on the sample surface, and the EB lithography apparatus (right).
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Figure 3. Illustration showing how to determine the position |
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| Figure 4. The world's smallest globe (nano-globe). It displays coastlines and rivers, and there is some contrast between land and sea areas. The patterning (EB exposure) of the entire world map only took about 2 minutes. |
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| Figure 5. Nano-filter with holes as small as 30 nanometers in diameter. |
